一个微孔, 长宽比几乎 200!
是的, 这是一个开放与 10 微米 (或更少) 最小直径, 一路走过1.8 毫米厚的异质 “三明治” of metal and dielectric materials.
这是有可能的帕萨奇 & #8217 的皮秒激光, 请注意你, 没有任何特殊的, 高能量器件, but a standard run-of-the-mill product.
在这种情况下 (请, 查看图片) a 6-ps, 266-nm (4-第斯谐波) 仅带 uv 激光器 30 每个脉冲在目标上传递的能量的微焦耳。 400 赫兹重复率约 2 每个钻孔分钟. 这个过程尽可能简单 – no special drilling techniques such as depth scanning or trepanning were used.
在 cu-ael 特氟隆样品中钻高纵横比微孔, 并有一个 passat & #8217 的现成样品 266 纳米皮卡 激光器.
层压样品有 127 microns thick Cu layer on both sides of 1/16-in-thick Teflon substrate.
在每一次 2 分钟, 样品侧向地被转移了并且沿横梁路径, 扫描聚焦梁的腰部. 梁被轻轻地聚焦与 f/# 的约 20 (焦距 60 毫米).
观察到的孔直径在不同之间变化 25 和小于 10 微米取决于梁焦距腰围与材料体积之间的重叠程度. 由于材料的厚度是梁的焦距的几倍, 这些孔的长度呈轻微的圆锥形. In this simple setup, no special care was taken to reduce the heat-affected zone (HAZ) but it was relatively small due to the short pulses used.
One can extrapolate this simple demonstration to a case where the laser, at its full energy ( 100 micro-Joules at 266 nm for the Compiler series), is integrated in a 3- or even 5-axis CNC system and envision the possibilities that such a system would present for precision laser micromachining.